Strain-induced Self-Rolled-up Membrane (S-RuM): (a) mechanism (b) scalability (c) modeling

Fabrication: CMOS compatible 2D processing for 3D structures via spontaneous strain relaxation

W. Huang, S. Koric, K. J. Hsia, X. Yu, and X. Li, "Precision structural engineering of self-rolled-up 3D nanomembranes guided by transient quasi-static FEM modeling", Nano Letters, 14 (11), 6293 (2014).[pdf]
P. Froeter, X. Yu, W. Huang, F. Du, M. Li, I. S. Chun, S. H. Kim, J. Hsia, J. A. Rogers, and X. Li, ''3D hierarchical architectures based on self-rolled-up silicon nitride membranes'', Nanotechnology 24, 475301 (2013). [pdf]
I.S. Chun, A. Challa, B. Derickson, K.J. Hsia, and X. Li, "Geometry Effect on the Strain-Induced Self-rolling of Semiconductor Membranes", Nano Lett. 10, 3927-3932 (2010). [pdf]
I.S. Chun, and X. Li, "Controlled Assembly and Dispersion of Strain-Induced InGaAs/GaAs Nanotubes," IEEE Trans. Nanotech. 7, 493-495 (2008). [pdf]

Rolled-up passive electronics: extreme reduction in size and weight, and performance (SWaP) enhancement

L. Sang, H. Zhou, Z. Yang, M. D. Kraman, H. Zhao, J. A. Michaels, D. J. Sievers, J. E. Schutt-aine, X. Li, and W. Huang, "Monolithic radio frequency SiNx self-rolled-up nanomembrane interdigital capacitor modeling and fabrication," Nanotechnology, 30, 364001 (2019).[pdf]
W. Huang, J. Zhou, P. Froeter, K. Walsh, S. Liu, M. Li, J. Michaels, D. Sievers, S. Gong, and X. Li, "Three-dimensional radio frequency transformers based on a self-rolled-up membrane platform," Nature Electron. 1, 305-313 (2018).[pdf]
X. Yu, W. Huang, M. Li, T. M. Comberiate, S. Gong, J. E. Schutt-Aine, and X. Li, "Ultra-Small, High-Frequency, and Substrate-Immune Microtube Inductors Transformed from 2D to 3D," Scientific Reports 5, Article number: 9661 (2015). doi:10.1038/srep09661.[pdf]
W. Huang, X. Yu, P. Froeter, R. Xu, P. Ferreira, and X. Li, "On-Chip Inductors with Self-Rolled-Up SiNx Nanomembrane Tubes: A Novel Design Platform for Extreme Miniaturization", Nano Lett. 12, 6283-6288(2012).[pdf]

X. Yu, L. L. Goddard, J. Zhu, X. Li, and X. Chen, "Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical micro resonators on ridge waveguides," Appl. Phys. Lett. 112, 021108 (2018).
X. Yu, L. L. Goddard, X. Li and X. Chen, "Enhanced axial confinement in a monolithically integrated self-rolled-up SiNx vertical microring photonic coupler," Appl. Phys. Lett. 109, 111104 (2016).
X. Yu, E. Arbabi, L. L. Goddard, X. Li and X. Chen, "Monolithically integrated self-rolled-up microtube-based vertical coupler for 3D photonic integration," Appl. Phys. Lett. 107, 031102 (2015).[pdf]
I.S. Chun, K.P. Bassett, A. Challa, and X. Li, "Tuning the photoluminescence characteristics with curvature for rolled-up GaAs quantum well microtubes", Appl. Phys. Lett. 96, 251106 (2010). [pdf]

Rolled-up neural interface: guiding, accelerating, and monitoring neuron cell growth

P. Froeter, Y. Huang, O. V. Cangellaris, M. U. Gillette, J. C. Williams and X. Li, "Toward Intelligent Synthetic Neural Circuits: Directing and Accelerating Neuron Cell Growth by Self-Rolled-Up Silicon Nitride Microtube Array," ACS Nano, 8 (11), 11108 (2014).[pdf]

Summary of self-rolled-up membrane concept, fabrication, properties, and applications [pdf]
X. Li, "Strain Induced Self-rolled-up Ring Resonators: a review of geometrical and resonant properties", Advances in Optics and Photonics, invited article, 3 (4), 366-387 (2011). [pdf]
X. Li, "Strain induced semiconductor nanotubes: from formation process to device applications", J. Phys. D: Appl. Phys. 41, 193001 (2008). [pdf]